Next-generation cleaning technology! Ultrasonic non-contact floating and transport device.
Non-contact transport of wafers and glass substrates using ultrasound! It's a clean transport technology! No contamination from contact! No contamination risk from air blow!
Compared to conventional solutions like Bernoulli chucks and air floating tables, ultrasonic non-contact transport technology has numerous advantages. ◆ No need for compressed air or compressors ◆ No air blowing in clean rooms ◆ No contamination risk from air blowing ◆ No risk of foreign object transfer due to contact ◆ Ultra-low energy transport technology ◆ Ultra-low running costs ◆ Transport with minimal load on the substrate and low damage rate
- 企業：ケー・ブラッシュ商会 本社
- 価格：Other
